| |
|
 |
| Material Properties |
| |
MgO |
LaAlO3 |
Al2O3 |
SrTiO3 |
YSZ |
| Crystal Structure |
Cubic |
Rhombohedrial |
Hexagonal |
Cubic |
Cubic |
| Lattice Constant (nm) |
0.4213 |
A =0. 5377¦Á=60.13
deg. |
A = 0.477 C = 1.304
|
A = 0.3905 |
A = 0.5139 |
| Density g/cm3 |
3.585 |
6.51 |
3.98 |
5.175 |
5.80 |
| Melting point ¡æ |
2800 |
2180 |
2040 |
2080 |
2500 |
Thermal expansion coefficient
X 10-6 K-1
|
14.2 |
10 |
// C-axis 6.7
¡Í C-axis 5.0
|
11.1 |
10.3 |
| Dielectric constant |
10 |
20 ¨C 25 |
// C-axis 9.0
¡Í C-axis 11.5
|
310 |
27 |
| »ùƬÐÔÄÜ
|
| |
MgO |
LaAlO3 |
Al2O3 |
SrTiO3 |
YSZ |
| Orientation |
(100) |
(100) |
(0001) (1-102) (11-20) |
(100) |
(100) |
| Orientation Accuracy |
¡Ü0.5 deg
¡Ü3 deg |
¡Ü0.5 deg |
¡Ü0.5 deg |
¡Ü0.5 deg
¡Ü3 |
¡Ü0.5 deg |
| Standard Size |
10 x 10 |
| Standard thickness |
0.5 |
| Size Tolerance |
+/- 0.1 |
| Thickness Tolerance |
+/- 0.05 +/- 0.01 |
| Parallelness |
¡Ü0.02 |
| Polish |
Standard : one-side epi-polished |
| Flatness |
¦Ë/4, ¦Ë/2 (¦Ë=633 nm) |
| Surface Roughness |
nm Ra < 10 nm, Rmax < 50 nm |
| Scratch and dig |
None |
| Surface Quality |
Without defects under light microscope |
| Size of Substrate mm |
| MgO£¨100£© |
LaAlO3£¨100£© |
Sapphire£¨0001£© |
Sapphire
£¨1-102£©
|
Sapphire£¨11-20£© |
SrTiO3
£¨100£©
|
YSZ
(100)
|
| 10 x 10 |
10 x 10 |
10 x 10 |
10 x 10 |
10 x 10 |
5 x 5 |
10 x 10 |
| 12.7 x 12.7 |
12.7 x 12.7 |
12.7 x 12.7 |
12.7 x 12.7 |
12.7 x 12.7 |
10 x 10 |
12.7 x 12.7 |
| 15 x 15 |
15 x 15 |
15 x 15 |
15 x 15 |
15 x 15 |
12.7 x 12.7 |
15 x 15 |
| 20 x 20 |
20 x 20 |
20 x 20 |
20 x 20 |
20 x 20 |
|
20 x 20 |
| 25.4 x 25.4 |
25.4 x 25.4 |
25.4 x 25.4 |
25.4 x 25.4 |
25.4 x 25.4 |
|
25.4 x 25.4 |
| 30 x 30 |
30 x 30 |
30 x 30 |
30 x 30 |
30 x 30 |
|
30 x 30 |
| 40 x 40 |
Dia. 50 |
Dia. 50 |
|
|
|
Dia. 50 |
| Dia. 50.8 |
Dia. 50.8 |
Dia. 50.8 |
|
|
|
Dia. 50.8 |
| Polish |
One-side / two-side epi-polished |
| Thickness |
0.5 / 1.0 mm, Other sizes, thickness and round substrate
upon buyer¡¯s request |
 |
| LiNbO3(Golden,Stick),LaAlO3+YBCO HTSe film(dark squares),Sapphire
Substrate(right,rectangle),YSZ substrate(left,white square),SrTiO3
Substrate (middle,white square),MgO substrate (right,white sauare) |
|
|
